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{001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition

Cardoletti, Juliette and Komissinskiy, Philipp and Bruder, Enrico and Morandi, Carl and Alff, Lambert (2020):
{001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition.
In: Journal of Applied Physics, 128 (10), p. 104103. American Institute of Physics, ISSN 0021-8979,
DOI: 10.1063/5.0019967,
[Article]

Abstract

In this work, we report nearly single oriented {001}-textured ferroelectric PbZr0:52Ti0:48O3 thin films grown by pulsed laser deposition onto AISI 304 stainless steel substrates. Pt, Al2O3, and LaNiO3 buffer layers promote the PbZr0:52Ti0:48O3 {001} texture and protect the substrate against oxidation during deposition. The dominant {001} texture of the PbZr0:52Ti0:48O3 layer was confirmed using x-ray and electron backscatter diffraction. Before poling, the films exhibit a permittivity of about 350 at 1 kHz and a dielectric loss below 5%. The films display a remanent polarization of about 16:5 mu Ccm(2) and a high coercive field of up to E-c 1/4 135:9 kVcm(-1). The properties of these PbZr0:52Ti0:48O3 thin films on stainless steel are promising for various MEMS applications such as transducers or energy harvesters.

Item Type: Article
Erschienen: 2020
Creators: Cardoletti, Juliette and Komissinskiy, Philipp and Bruder, Enrico and Morandi, Carl and Alff, Lambert
Title: {001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition
Language: English
Abstract:

In this work, we report nearly single oriented {001}-textured ferroelectric PbZr0:52Ti0:48O3 thin films grown by pulsed laser deposition onto AISI 304 stainless steel substrates. Pt, Al2O3, and LaNiO3 buffer layers promote the PbZr0:52Ti0:48O3 {001} texture and protect the substrate against oxidation during deposition. The dominant {001} texture of the PbZr0:52Ti0:48O3 layer was confirmed using x-ray and electron backscatter diffraction. Before poling, the films exhibit a permittivity of about 350 at 1 kHz and a dielectric loss below 5%. The films display a remanent polarization of about 16:5 mu Ccm(2) and a high coercive field of up to E-c 1/4 135:9 kVcm(-1). The properties of these PbZr0:52Ti0:48O3 thin films on stainless steel are promising for various MEMS applications such as transducers or energy harvesters.

Journal or Publication Title: Journal of Applied Physics
Journal volume: 128
Number: 10
Publisher: American Institute of Physics
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science > Physical Metallurgy
Date Deposited: 20 Nov 2020 09:02
DOI: 10.1063/5.0019967
Projects: This work was funded by the Deutsche Forschungsgemeinschaft (DFG) under Grant No. AL 560/19-1., A travel grant from the EIT RawMaterials IDS-FunMat-Inno is also acknowledged.
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