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Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications

Schwalke, Udo ; Noll, Dennis (2019)
Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications.
Electron Devices Technology and Manufacturing Conference (EDTM). Singapore, Singapore (12.-15.03.2019)
doi: 10.1109/EDTM.2019.8731320
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2019
Creators: Schwalke, Udo ; Noll, Dennis
Type of entry: Bibliographie
Title: Silicon-CMOS Compatible Transfer-Free Fabrication of Nanocrystalline Graphene Field-Effect Devices for Smart Gas-Sensor Applications
Language: English
Date: March 2019
Place of Publication: Singapore, Singapore
Event Title: Electron Devices Technology and Manufacturing Conference (EDTM)
Event Location: Singapore, Singapore
Event Dates: 12.-15.03.2019
DOI: 10.1109/EDTM.2019.8731320
URL / URN: https://ieeexplore.ieee.org/abstract/document/8731320
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 30 Jul 2019 09:55
Last Modified: 30 Jul 2019 09:55
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