Noll, Dennis ; Schwalke, Udo (2015)
Silicon CMOS Compatible In-situ CCVD Growth of Graphene on Silicon Nitride.
10th International Conference on Design and Technology of Integrated Systems in Nanoscale Era (DTIS). Naples, Italy (21.-23.04.2015)
doi: 10.1109/DTIS.2015.7127387
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2015 |
| Creators: | Noll, Dennis ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Silicon CMOS Compatible In-situ CCVD Growth of Graphene on Silicon Nitride |
| Language: | English |
| Date: | April 2015 |
| Place of Publication: | Naples, Italy |
| Event Title: | 10th International Conference on Design and Technology of Integrated Systems in Nanoscale Era (DTIS) |
| Event Location: | Naples, Italy |
| Event Dates: | 21.-23.04.2015 |
| DOI: | 10.1109/DTIS.2015.7127387 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 30 Jul 2019 09:33 |
| Last Modified: | 30 Jul 2019 09:33 |
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