Boden, Jana ; Bächmann, K. ; Lotz, ; Fabry, ; Pahlke, (1995):
CZE application with an ITP initial state to determine anionic impurities on as-polished silicon wafer surfaces.
In: Journal of chromatography. A 696 (1995), S. 321-332, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Boden, Jana ; Bächmann, K. ; Lotz, ; Fabry, ; Pahlke, |
| Title: | CZE application with an ITP initial state to determine anionic impurities on as-polished silicon wafer surfaces |
| Language: | English |
| Journal or Publication Title: | Journal of chromatography. A 696 (1995), S. 321-332 |
| Divisions: | 07 Department of Chemistry 07 Department of Chemistry > Fachgebiet Anorganische Chemie |
| Date Deposited: | 19 Nov 2008 15:55 |
| License: | [undefiniert] |
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