Schmid, Christoph ; Maier, V. ; Schaufler, J. ; Butz, B. ; Spiecker, E. ; Meier, S. ; Göken, M. ; Durst, Karsten (2013)
Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy.
In: Thin Solid Films, (528)
doi: 10.1016/j.tsf.2012.05.092
Article, Bibliographie
Item Type: | Article |
---|---|
Erschienen: | 2013 |
Creators: | Schmid, Christoph ; Maier, V. ; Schaufler, J. ; Butz, B. ; Spiecker, E. ; Meier, S. ; Göken, M. ; Durst, Karsten |
Type of entry: | Bibliographie |
Title: | Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy |
Language: | English |
Date: | 2013 |
Journal or Publication Title: | Thin Solid Films |
Issue Number: | 528 |
DOI: | 10.1016/j.tsf.2012.05.092 |
Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Physical Metallurgy |
Date Deposited: | 19 Jul 2018 11:26 |
Last Modified: | 19 Jul 2018 11:26 |
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