Schmid, Christoph ; Maier, V. ; Schaufler, J. ; Butz, B. ; Spiecker, E. ; Meier, S. ; Göken, M. ; Durst, Karsten (2013):
Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy.
In: Thin Solid Films, (528), pp. 263-268. ISSN 00406090,
DOI: 10.1016/j.tsf.2012.05.092,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2013 |
| Creators: | Schmid, Christoph ; Maier, V. ; Schaufler, J. ; Butz, B. ; Spiecker, E. ; Meier, S. ; Göken, M. ; Durst, Karsten |
| Title: | Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy |
| Language: | English |
| Journal or Publication Title: | Thin Solid Films |
| Issue Number: | 528 |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Physical Metallurgy |
| Date Deposited: | 19 Jul 2018 11:26 |
| DOI: | 10.1016/j.tsf.2012.05.092 |
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