TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Jump to: 1996
Number of items: 1.

1996

Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A. Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
6, In: Simulation of Semiconductor Devices and Processes, Springer, pp. 258-261, [Article]

This list was generated on Tue Dec 10 00:45:43 2019 CET.