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Durst, F. and Galjukov, A. and Makarov, Y. and Schäfer, Michael and Voinovich, P. and Zhmakin, A. Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
6, In: Simulation of Semiconductor Devices and Processes, Springer, pp. 258-261, [Article]

This list was generated on Tue Dec 10 00:45:43 2019 CET.