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Dehé, Alfons and Peerlings, and Pfeiffer, and Riemenschneider, and Vogt, and Streubel, and Künzel, and Meißner, and Hartnagel, (1998):
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
In: Sensors and actuators. 68 (1998), S. 365-371, [Article]

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