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Conference or Workshop Item

Wirbeleit, F. and Pedrero, V. and Thron, D. and Stephan, R. and Schwalke, Udo (2008):
Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon.
Material Research Society (MRS), San Francisco, CA, USA, 24.-28.03.2008, [Conference or Workshop Item]

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