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Article

Rombach, Pirmin ; Steiger, H. ; Langheinrich, W. (1995):
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of Micromechanics and Microengineering, 5, pp. 136-138. IOP Publishing Ltd, ISSN 0960-1317,
[Article]

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