TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Article

Peter, Daniel and Dalmer, Michael and Lechner, Alfred and Gigler, Alexander M. and Stark, Robert W. and Bensch, Wolfgang (2011):
Measurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse.
In: Journal of Micromechanics and Microengineering, 21, (2), ISSN 0960-1317,
[Online-Edition: http://dx.doi.org/10.1088/0960-1317/21/2/025001],
[Article]

This list was generated on Tue Nov 19 01:26:17 2019 CET.