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Article

Flege, Stefan and Hatada, Ruriko and Jantsen, Gennadi and Walbert, Torsten and Ensinger, Wolfgang and Baba, Koumei and Morimura, Takao and Muench, Falk (2017):
Nanoparticles as a Metal Source in Plasma Processes.
In: Transactions of the Materials Research Society of Japan, pp. 31-36, 42, (2), ISSN 1382-3469,
DOI: 10.14723/tmrsj.42.31,
[Online-Edition: https://doi.org/10.14723/tmrsj.42.31],
[Article]

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