Conference or Workshop Item

Pfeiffer, Joachim and Riemenschneider, R. and Mutamba, K. and Peerlings, J. and Afshar, B. E. and Baaser, Herbert and Grunert, D. and Meissner, P. and Hartnagel, H. L. (1999):
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383, [Conference or Workshop Item]