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Jump to: 1995
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Bergunde, T. and Dauelsberg, M. and Egorov, Yu and Kadinski, L. and Makarov, Yu N. and Schäfer, M. and Strauch, G. and Weyers, M. (1995):
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.
6, In: Simulation of Semiconductor Devices and Processes, Springer, pp. 328-331, [Article]

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