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Article

Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. (1997):
Boron carbonitride thin films by PACVD of single source precursors.
3, In: Chemical Vapor Deposition, (5), WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, ISSN 0948-1907,
[Article]

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