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Jump to: 1995 | 1994
Number of items: 2.

1995

Bergunde, T. ; Dauelsberg, M. ; Egorov, Yu ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Strauch, G. ; Weyers, M. (1995):
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.
In: Simulation of Semiconductor Devices and Processes, 6, pp. 328-331. Springer, [Article]

1994

Bergunde, T. ; Durst, F. ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Weyers, M. (1994):
Modelling of growth in a 5 X 3 inch multiwafer metalorganic vapour phase epitaxy reactor.
In: Journal of crystal growth, 145 (1), pp. 630-635. Elsevier, [Article]

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