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Sensor array on structured PET substrates for detection of thin dielectric layers at terahertz frequencies

Maasch, M. and Mueh, M. and Damm, C. (2017):
Sensor array on structured PET substrates for detection of thin dielectric layers at terahertz frequencies.
pp. 1030-1033, 2017 IEEE MTT-S International Microwave Symposium (IMS), DOI: 10.1109/MWSYM.2017.8058768,
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2017
Creators: Maasch, M. and Mueh, M. and Damm, C.
Title: Sensor array on structured PET substrates for detection of thin dielectric layers at terahertz frequencies
Language: English
Uncontrolled Keywords: dielectric thin films;permittivity;polymers;sensor arrays;thin film sensors;MUT thicknesses;Polyethylene terephthalate substrate;dielectric materials;electric field;floating electrode;frequency 0.5 THz;permittivity;planar resonant structures;resonance frequency shift;resonant Jerusalem cross unit cell;sensor array;size 3.3 mum;strictly planar resonant structures;structured PET substrates;terahertz frequencies;thin dielectric layer;Dielectrics;Electrodes;Etching;Frequency measurement;Resonant frequency;Resonators;Substrates;Terahertz devices;electromagnetic sensors;frequency selective surfaces
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Terahertz Sensors Group
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
18 Department of Electrical Engineering and Information Technology
Event Title: 2017 IEEE MTT-S International Microwave Symposium (IMS)
Date Deposited: 06 Apr 2018 12:00
DOI: 10.1109/MWSYM.2017.8058768
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