Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W. (2018):
Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane.
In: Materials Letters, 215, pp. 68-70. Elsevier Science Publishing, ISSN 0167577X,
DOI: 10.1016/j.matlet.2017.12.061,
[Article]
Abstract
Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.
| Item Type: | Article |
|---|---|
| Erschienen: | 2018 |
| Creators: | Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W. |
| Title: | Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane |
| Language: | English |
| Abstract: | Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films. |
| Journal or Publication Title: | Materials Letters |
| Journal volume: | 215 |
| Publisher: | Elsevier Science Publishing |
| Uncontrolled Keywords: | Diamond-like carbon, Plasma Deposition, Iodine, Thin film |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 28 Dec 2017 09:52 |
| DOI: | 10.1016/j.matlet.2017.12.061 |
| Official URL: | https://doi.org/10.1016/j.matlet.2017.12.061 |
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