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Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane

Inoi, T. and Baba, K. and Flege, S. and Hatada, R. and Ensinger, W. (2018):
Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane.
In: Materials Letters, Elsevier Science Publishing, pp. 68-70, 215, ISSN 0167577X, DOI: 10.1016/j.matlet.2017.12.061, [Online-Edition: https://doi.org/10.1016/j.matlet.2017.12.061],
[Article]

Abstract

Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.

Item Type: Article
Erschienen: 2018
Creators: Inoi, T. and Baba, K. and Flege, S. and Hatada, R. and Ensinger, W.
Title: Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane
Language: English
Abstract:

Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.

Journal or Publication Title: Materials Letters
Volume: 215
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Diamond-like carbon, Plasma Deposition, Iodine, Thin film
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 28 Dec 2017 09:52
DOI: 10.1016/j.matlet.2017.12.061
Official URL: https://doi.org/10.1016/j.matlet.2017.12.061
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