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Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane

Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W. (2018)
Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane.
In: Materials Letters, 215
doi: 10.1016/j.matlet.2017.12.061
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.

Typ des Eintrags: Artikel
Erschienen: 2018
Autor(en): Inoi, T. ; Baba, K. ; Flege, S. ; Hatada, R. ; Ensinger, W.
Art des Eintrags: Bibliographie
Titel: Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane
Sprache: Englisch
Publikationsjahr: 15 März 2018
Verlag: Elsevier Science Publishing
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Materials Letters
Jahrgang/Volume einer Zeitschrift: 215
DOI: 10.1016/j.matlet.2017.12.061
URL / URN: https://doi.org/10.1016/j.matlet.2017.12.061
Kurzbeschreibung (Abstract):

Iodine containing diamond-like carbon (DLC) films were prepared by a plasma-enhanced chemical vapor deposition process using a mixture of trifluoroiodomethane (CF3I) and acetylene (C2H2) as plasma gas. The resulting films contain iodine throughout but are mostly fluorine free. Even though the precursor contains more fluorine than iodine, fluorine is only present in larger concentrations in the surface and interface region. The films are smooth, show a decreased hardness and a higher contact angle as compared to iodine free DLC films.

Freie Schlagworte: Diamond-like carbon, Plasma Deposition, Iodine, Thin film
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 28 Dez 2017 09:52
Letzte Änderung: 28 Dez 2017 09:52
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