Hatada, R. and Flege, S. and Ensinger, W. and Baba, K. (2018):
Preparation of anatase films from titanium containing diamond-like carbon films.
In: Materials Letters, 213, pp. 148-150. Elsevier Science Publishing, ISSN 0167577X,
DOI: 10.1016/j.matlet.2017.11.034,
[Article]
Abstract
Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing.
| Item Type: | Article |
|---|---|
| Erschienen: | 2018 |
| Creators: | Hatada, R. and Flege, S. and Ensinger, W. and Baba, K. |
| Title: | Preparation of anatase films from titanium containing diamond-like carbon films |
| Language: | English |
| Abstract: | Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing. |
| Journal or Publication Title: | Materials Letters |
| Journal volume: | 213 |
| Publisher: | Elsevier Science Publishing |
| Uncontrolled Keywords: | Thin films, Oxidation, Anatase, Deposition |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 28 Dec 2017 09:46 |
| DOI: | 10.1016/j.matlet.2017.11.034 |
| Official URL: | https://doi.org/10.1016/j.matlet.2017.11.034 |
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