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Preparation of anatase films from titanium containing diamond-like carbon films

Hatada, R. and Flege, S. and Ensinger, W. and Baba, K. (2018):
Preparation of anatase films from titanium containing diamond-like carbon films.
In: Materials Letters, Elsevier Science Publishing, pp. 148-150, 213, ISSN 0167577X,
DOI: 10.1016/j.matlet.2017.11.034,
[Online-Edition: https://doi.org/10.1016/j.matlet.2017.11.034],
[Article]

Abstract

Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing.

Item Type: Article
Erschienen: 2018
Creators: Hatada, R. and Flege, S. and Ensinger, W. and Baba, K.
Title: Preparation of anatase films from titanium containing diamond-like carbon films
Language: English
Abstract:

Carbon can play a decisive role in the preparation of the titanium dioxide modification anatase. Amorphous titanium containing diamond-like carbon films are a suitable basis for this process. Those films can be deposited by a process that combines reactive magnetron sputtering with plasma source ion implantation, using a mixture of argon and ethylene (C2H4) for the plasma. After film deposition, annealing of the samples for 1 h at a fixed temperature between 723 K and 873 K in ambient atmosphere led to oxidation and crystallization. Colorless pure anatase was observed after annealing.

Journal or Publication Title: Materials Letters
Volume: 213
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Thin films, Oxidation, Anatase, Deposition
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 28 Dec 2017 09:46
DOI: 10.1016/j.matlet.2017.11.034
Official URL: https://doi.org/10.1016/j.matlet.2017.11.034
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