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Motion analyzer for characterization of micro actuators with movements in 3 degrees of freedom

Nakic, Christian and Schlaak, Helmut F. (2017):
Motion analyzer for characterization of micro actuators with movements in 3 degrees of freedom.
In: Proceedings - Mikrosystemtechnik Kongress 2017, In: Mikrosystemtechnikkongress 2017, München, Unterschleißheim, Deutschland, 23.-25. Oktober 2017, [Conference or Workshop Item]

Abstract

This work presents a novel measurement device for the deflection and temperature distribution of polymer electrothermal actuators. Combining a CCD camera with optical pattern matching and a laser triangulation measurement system the motion analyzer enables the characterization of movements in three degrees of freedom in a measurement range of 4.5 mm x 4.5 mm x 4 mm. Occurring optical errors, measurement accuracies and dynamic limits of the motion analyzer are determined.

Item Type: Conference or Workshop Item
Erschienen: 2017
Creators: Nakic, Christian and Schlaak, Helmut F.
Title: Motion analyzer for characterization of micro actuators with movements in 3 degrees of freedom
Language: English
Abstract:

This work presents a novel measurement device for the deflection and temperature distribution of polymer electrothermal actuators. Combining a CCD camera with optical pattern matching and a laser triangulation measurement system the motion analyzer enables the characterization of movements in three degrees of freedom in a measurement range of 4.5 mm x 4.5 mm x 4 mm. Occurring optical errors, measurement accuracies and dynamic limits of the motion analyzer are determined.

Title of Book: Proceedings - Mikrosystemtechnik Kongress 2017
Uncontrolled Keywords: measurement setup, electrothermal actuator, out-of-plane actuator, 3 DOF
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Event Title: Mikrosystemtechnikkongress 2017
Event Location: München, Unterschleißheim, Deutschland
Event Dates: 23.-25. Oktober 2017
Date Deposited: 06 Nov 2017 12:54
Identification Number: ISBN 978-3-8007-4491-6
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