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Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation

Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Ensinger, Wolfgang and Baba, Koumei (2017):
Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation.
In: Transactions of the Materials Research Society of Japan, pp. 37-40, 42, (2), ISSN 1382-3469, DOI: 10.14723/tmrsj.42.37, [Online-Edition: https://doi.org/10.14723/tmrsj.42.37],
[Article]

Abstract

Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.

Item Type: Article
Erschienen: 2017
Creators: Hatada, Ruriko and Flege, Stefan and Rimmler, Berthold and Ensinger, Wolfgang and Baba, Koumei
Title: Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation
Language: English
Abstract:

Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.

Journal or Publication Title: Transactions of the Materials Research Society of Japan
Volume: 42
Number: 2
Uncontrolled Keywords: diamond-like carbon, plasma source ion implantation, surface morphology, friction coefficient
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 21 Jul 2017 08:53
DOI: 10.14723/tmrsj.42.37
Official URL: https://doi.org/10.14723/tmrsj.42.37
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