Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Ensinger, Wolfgang ; Baba, Koumei (2017)
Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation.
In: Transactions of the Materials Research Society of Japan, 42 (2)
doi: 10.14723/tmrsj.42.37
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2017 |
| Autor(en): | Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Ensinger, Wolfgang ; Baba, Koumei |
| Art des Eintrags: | Bibliographie |
| Titel: | Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation |
| Sprache: | Englisch |
| Publikationsjahr: | 3 April 2017 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Transactions of the Materials Research Society of Japan |
| Jahrgang/Volume einer Zeitschrift: | 42 |
| (Heft-)Nummer: | 2 |
| DOI: | 10.14723/tmrsj.42.37 |
| URL / URN: | https://doi.org/10.14723/tmrsj.42.37 |
| Kurzbeschreibung (Abstract): | Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures. |
| Freie Schlagworte: | diamond-like carbon, plasma source ion implantation, surface morphology, friction coefficient |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 21 Jul 2017 08:53 |
| Letzte Änderung: | 31 Jan 2019 06:58 |
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