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Garnet-Type Li 7 La 3 Zr 2 O 12 Solid Electrolyte Thin Films Grown by CO 2 -Laser Assisted CVD for All-Solid-State Batteries

Loho, Christoph and Djenadic, Ruzica and Bruns, Michael and Clemens, Oliver and Hahn, Horst (2016):
Garnet-Type Li 7 La 3 Zr 2 O 12 Solid Electrolyte Thin Films Grown by CO 2 -Laser Assisted CVD for All-Solid-State Batteries.
In: Journal of The Electrochemical Society, 164 (1), pp. A6131-A6139. ECS, ISSN 0013-4651,
[Article]

Abstract

The detailed characterization of garnet-type Li-ion conducting Li7La3Zr2O12 (LLZO) solid electrolyte thin films grown by novel CO2-laser assisted chemical vapor deposition (LA-CVD) is reported. A deposition process parameter study reveals that an optimal combination of deposition temperature and oxygen partial pressure is essential to obtain high quality tetragonal LLZO thin films. The polycrystalline tetragonal LLZO films grown on platinum have a dense and homogeneous microstructure and are free of cracks. A total lithium ion conductivity of 4.2·10−6 S·cm−1 at room temperature, with an activation energy of 0.50 eV, is achieved. This is the highest total lithium ion conductivity value reported for tetragonal LLZO thin films so far, being about one order of magnitude higher than previously reported values for tetragonal LLZO thin films prepared by sputtering and pulsed laser deposition. The results of this study suggest that the tetragonal LLZO thin films grown by LA-CVD are applicable for the use in all-solid-state thin film lithium ion batteries.

Item Type: Article
Erschienen: 2016
Creators: Loho, Christoph and Djenadic, Ruzica and Bruns, Michael and Clemens, Oliver and Hahn, Horst
Title: Garnet-Type Li 7 La 3 Zr 2 O 12 Solid Electrolyte Thin Films Grown by CO 2 -Laser Assisted CVD for All-Solid-State Batteries
Language: English
Abstract:

The detailed characterization of garnet-type Li-ion conducting Li7La3Zr2O12 (LLZO) solid electrolyte thin films grown by novel CO2-laser assisted chemical vapor deposition (LA-CVD) is reported. A deposition process parameter study reveals that an optimal combination of deposition temperature and oxygen partial pressure is essential to obtain high quality tetragonal LLZO thin films. The polycrystalline tetragonal LLZO films grown on platinum have a dense and homogeneous microstructure and are free of cracks. A total lithium ion conductivity of 4.2·10−6 S·cm−1 at room temperature, with an activation energy of 0.50 eV, is achieved. This is the highest total lithium ion conductivity value reported for tetragonal LLZO thin films so far, being about one order of magnitude higher than previously reported values for tetragonal LLZO thin films prepared by sputtering and pulsed laser deposition. The results of this study suggest that the tetragonal LLZO thin films grown by LA-CVD are applicable for the use in all-solid-state thin film lithium ion batteries.

Journal or Publication Title: Journal of The Electrochemical Society
Journal volume: 164
Number: 1
Publisher: ECS
Uncontrolled Keywords: All-solid-state lithium ion battery, Chemical vapor deposition, Garnet-type Li7La3Zr2O12, Ionic conductivity, Solid electrolyte, Thin film
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Fachgebiet Materialdesign durch Synthese
11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 22 Mar 2017 10:00
Official URL: http://doi.org/10.1149/2.0201701jes
Additional Information:

This was Paper 718 presented at the Chicago, Illinois, Meeting of the IMLB, June 19–24, 2016. This paper is part of the Focus Issue of Selected Papers from IMLB 2016 with Invited Papers Celebrating 25 Years of Lithium Ion Batteries.

Identification Number: doi:10.1149/2.0201701jes
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