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Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators

Lu, D. and Zheng, Y. and Penirschke, A. and Jakoby, R. (2016):
Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators.
In: IEEE Sensors Journal, pp. 13-14, 16, (1), ISSN 1530-437X,
[Online-Edition: http://dx.doi.org/10.1109/JSEN.2015.2468082],
[Article]

Item Type: Article
Erschienen: 2016
Creators: Lu, D. and Zheng, Y. and Penirschke, A. and Jakoby, R.
Title: Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators
Language: German
Journal or Publication Title: IEEE Sensors Journal
Volume: 16
Number: 1
Uncontrolled Keywords: electrochemical electrodes;humidity measurement;humidity sensors;photodetectors;photolithography;polymer films;surface acoustic wave resonators;surface acoustic wave sensors;thickness measurement;thin film sensors;PVA film thickness measurement;SAW resonator;anticorrosive gold electrode;contact pad;interdigital transducer pad;photolithographically patterned PVA film deposition;polyvinyl-alcohol film;relative humidity sensor;surface acoustic wave resonator;Bandwidth;Humidity;Resonant frequency;Sensitivity;Sensor phenomena and characterization;Surface acoustic waves;Microwave;SAW resonator;patterned polyvinyl-alcohol film;relative humidity sensor
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Microwave Engineering
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
18 Department of Electrical Engineering and Information Technology
Date Deposited: 21 Mar 2016 12:12
Official URL: http://dx.doi.org/10.1109/JSEN.2015.2468082
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