Lu, D. ; Zheng, Y. ; Penirschke, A. ; Jakoby, R. (2016):
Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators.
In: IEEE Sensors Journal, 16 (1), pp. 13-14. ISSN 1530-437X,
[Article]
Official URL: http://dx.doi.org/10.1109/JSEN.2015.2468082
| Item Type: | Article |
|---|---|
| Erschienen: | 2016 |
| Creators: | Lu, D. ; Zheng, Y. ; Penirschke, A. ; Jakoby, R. |
| Title: | Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators |
| Language: | German |
| Journal or Publication Title: | IEEE Sensors Journal |
| Journal volume: | 16 |
| Number: | 1 |
| Uncontrolled Keywords: | electrochemical electrodes;humidity measurement;humidity sensors;photodetectors;photolithography;polymer films;surface acoustic wave resonators;surface acoustic wave sensors;thickness measurement;thin film sensors;PVA film thickness measurement;SAW resonator;anticorrosive gold electrode;contact pad;interdigital transducer pad;photolithographically patterned PVA film deposition;polyvinyl-alcohol film;relative humidity sensor;surface acoustic wave resonator;Bandwidth;Humidity;Resonant frequency;Sensitivity;Sensor phenomena and characterization;Surface acoustic waves;Microwave;SAW resonator;patterned polyvinyl-alcohol film;relative humidity sensor |
| Divisions: | 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Microwave Engineering 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 21 Mar 2016 12:12 |
| Official URL: | http://dx.doi.org/10.1109/JSEN.2015.2468082 |
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