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Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere

Kaloumenos, Mareiki and Hofmann, Klaus and Spiehl, Dieter and Hoffmann, Rudolf C. and Precht, Ruben and Bonrad, Klaus (2016):
Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere.
In: Thin Solid Films, pp. 59-64, 600, ISSN 00406090, [Online-Edition: http://dx.doi.org/10.1016/j.tsf.2015.12.068],
[Article]

Item Type: Article
Erschienen: 2016
Creators: Kaloumenos, Mareiki and Hofmann, Klaus and Spiehl, Dieter and Hoffmann, Rudolf C. and Precht, Ruben and Bonrad, Klaus
Title: Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere
Language: English
Journal or Publication Title: Thin Solid Films
Volume: 600
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD)
18 Department of Electrical Engineering and Information Technology
Zentrale Einrichtungen
Date Deposited: 09 Feb 2016 15:02
Official URL: http://dx.doi.org/10.1016/j.tsf.2015.12.068
Identification Number: doi:10.1016/j.tsf.2015.12.068
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