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Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors

Lotichius, Jan and Christmann, Eike and Werthschützky, Roland (2015):
Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors.
Nürnberg, In: Proceedings SENSOR 2015, Nürnberg, 19.05.2015-21.05.2015, 2015, [Online-Edition: http://www.ama-science.org/proceedings/details/2031],
[Conference or Workshop Item]

Abstract

This paper presents the state space modelling of a temperature test chamber with 0.25 l volume that is tempered with a peltier device. A thermodynamic model of the test chamber is presented, giving different temperatures from heat gain, thermal loss network, incoming air temperature and airflow. Available temperature sensors are evaluated for their measurement uncertainty and an integrated solution is chosen. Control of the peltier device is discussed and based on the thermodynamic model a PI controller is chosen. A prototype is presented and model parameters are identified based on the step response. Static Accuracy is shown to be within 0.2 K with the PI controller.

Item Type: Conference or Workshop Item
Erschienen: 2015
Creators: Lotichius, Jan and Christmann, Eike and Werthschützky, Roland
Title: Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors
Language: English
Abstract:

This paper presents the state space modelling of a temperature test chamber with 0.25 l volume that is tempered with a peltier device. A thermodynamic model of the test chamber is presented, giving different temperatures from heat gain, thermal loss network, incoming air temperature and airflow. Available temperature sensors are evaluated for their measurement uncertainty and an integrated solution is chosen. Control of the peltier device is discussed and based on the thermodynamic model a PI controller is chosen. A prototype is presented and model parameters are identified based on the step response. Static Accuracy is shown to be within 0.2 K with the PI controller.

Volume: 2015
Place of Publication: Nürnberg
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
Event Title: Proceedings SENSOR 2015
Event Location: Nürnberg
Event Dates: 19.05.2015-21.05.2015
Date Deposited: 10 Dec 2015 16:19
Official URL: http://www.ama-science.org/proceedings/details/2031
Identification Number: doi:10.5162/sensor2015/C8.1
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