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Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition

Sobel, Nicolas and Hess, Christian (2015):
Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition.
In: Angewandte Chemie International Edition, pp. 15014-15021, 54, (50), ISSN 14337851, [Online-Edition: http://dx.doi.org/10.1002/anie.201503680],
[Article]

Item Type: Article
Erschienen: 2015
Creators: Sobel, Nicolas and Hess, Christian
Title: Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition
Language: English
Journal or Publication Title: Angewandte Chemie International Edition
Volume: 54
Number: 50
Divisions: 07 Department of Chemistry > Physical Chemistry
07 Department of Chemistry
Date Deposited: 06 Nov 2015 15:47
Official URL: http://dx.doi.org/10.1002/anie.201503680
Identification Number: doi:10.1002/anie.201503680
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