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A thermal network model for piezoresistive pressure sensors

Lotichius, Jan and Singer, Timo and Brokmann, Geert and Übensee, Hartmut and Ortlepp, Thomas and Kupnik, Mario and Werthschützky, Roland (2015):
A thermal network model for piezoresistive pressure sensors.
In: IEEE Sensors 2015, Busan, Südkorea, 01.11.2015 - 04.11.2015, [Conference or Workshop Item]

Abstract

Excitation of resistive sensors with dynamic signals for low power consumption requires focusing on thermal and electrical behavior. Knowledge of both settling times is beneficial for sensor error correction. Therefore, a thermal model for piezoresistive pressure sensors is presented in this paper. It yields analytical equations for temperature distribution from basic physics laws. This lumped element equivalent circuit model (EQC) offers a quick way to simulate vast parameter numbers. It incorporates self-heating as well as ambient temperature influence. Our model uses 13 thermal resistors and seven thermal capacitances. Comparing the resistance change due to thermal behavior of a sample sensor with the model shows deviations smaller than the measurement uncertainty of 42 ppm.

Item Type: Conference or Workshop Item
Erschienen: 2015
Creators: Lotichius, Jan and Singer, Timo and Brokmann, Geert and Übensee, Hartmut and Ortlepp, Thomas and Kupnik, Mario and Werthschützky, Roland
Title: A thermal network model for piezoresistive pressure sensors
Language: English
Abstract:

Excitation of resistive sensors with dynamic signals for low power consumption requires focusing on thermal and electrical behavior. Knowledge of both settling times is beneficial for sensor error correction. Therefore, a thermal model for piezoresistive pressure sensors is presented in this paper. It yields analytical equations for temperature distribution from basic physics laws. This lumped element equivalent circuit model (EQC) offers a quick way to simulate vast parameter numbers. It incorporates self-heating as well as ambient temperature influence. Our model uses 13 thermal resistors and seven thermal capacitances. Comparing the resistance change due to thermal behavior of a sample sensor with the model shows deviations smaller than the measurement uncertainty of 42 ppm.

Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology
Event Title: IEEE Sensors 2015
Event Location: Busan, Südkorea
Event Dates: 01.11.2015 - 04.11.2015
Date Deposited: 04 Nov 2015 13:39
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