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Chemical and physical properties in layers and interfaces of nanolayered Si(100)/Ni/BCxNy stacks

Hoffmann, Peter and Kosinova, M. and Flege, Stefan and Brötz, Joachim and Trunova, V. and Dietz, Christian and Ensinger, Wolfgang (2015):
Chemical and physical properties in layers and interfaces of nanolayered Si(100)/Ni/BCxNy stacks.
In: X-Ray Spectrometry, WILEY-VCH Verlag GmbH & Co. KGaA, pp. 48-53, 44, (2), ISSN 1097-4539,
[Online-Edition: http://onlinelibrary.wiley.com/doi/10.1002/xrs.2578/abstract],
[Article]

Abstract

Layered stacks of the structure Si(100)/Ni/BCxNy were produced by physical (Ni) and chemical (BCN) vapor deposition. The BCN layers were deposited at temperatures of 200, 300, 400, and 500 °C. The resulting samples were characterized by ellipsometry, X-ray photoelectron spectrometry, secondary ion mass spectrometry, atomic force microscopy, and X-ray reflectometry. The formed structures of the samples synthesized at 200 and 500 °C, respectively, were determined. For the synthesis temperature of 200 °C, compounds with Ni-C bonds were found at the interface Ni/BCxNy. For the sample produced at 500 °C, compounds with Ni-Si bonds were identified, dispersed as particles or droplets in the corresponding interface. Copyright © 2015 John Wiley & Sons, Ltd.

Item Type: Article
Erschienen: 2015
Creators: Hoffmann, Peter and Kosinova, M. and Flege, Stefan and Brötz, Joachim and Trunova, V. and Dietz, Christian and Ensinger, Wolfgang
Title: Chemical and physical properties in layers and interfaces of nanolayered Si(100)/Ni/BCxNy stacks
Language: English
Abstract:

Layered stacks of the structure Si(100)/Ni/BCxNy were produced by physical (Ni) and chemical (BCN) vapor deposition. The BCN layers were deposited at temperatures of 200, 300, 400, and 500 °C. The resulting samples were characterized by ellipsometry, X-ray photoelectron spectrometry, secondary ion mass spectrometry, atomic force microscopy, and X-ray reflectometry. The formed structures of the samples synthesized at 200 and 500 °C, respectively, were determined. For the synthesis temperature of 200 °C, compounds with Ni-C bonds were found at the interface Ni/BCxNy. For the sample produced at 500 °C, compounds with Ni-Si bonds were identified, dispersed as particles or droplets in the corresponding interface. Copyright © 2015 John Wiley & Sons, Ltd.

Journal or Publication Title: X-Ray Spectrometry
Volume: 44
Number: 2
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces
11 Department of Materials and Earth Sciences > Material Science > Structure Research
Date Deposited: 26 Mar 2015 16:43
Official URL: http://onlinelibrary.wiley.com/doi/10.1002/xrs.2578/abstract
Funders: The authors acknowledge the financial support by Deutsche Forschungsgemeinschaft (DFG), grant EN 207/25-1, and by the Russian Foundation of Basic Research (RFBR=RFFI), grant 10-03-91332.
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