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Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors

Quednau, S. and Dassinger, F. and Schlaak, Helmut F. (2014):
Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors.
In: ITG/GMA Symposium; Proceedings of Sensors and Measuring Systems 2014; 17, [Conference or Workshop Item]

Abstract

This work demonstrates a process for the in-place growth of metallic nanowires in microsystems. The wires are arranged in bunches, the so called nanowire arrays. The process expands the established ion track etch method and combines it with conventional MEMS technologies like photolithography. The process is described in detail and demonstrated by fabricating a calorimetric gas flow sensor with nanowire arrays. Two serially connected nanowire arrays are placed before and behind an electrically heated conductor on a glass substrate. The nanowire arrays work as fast temperature sensing elements to determine the gas flow over the sensor. The steady state sensor characteristics are measured, the time constant is estimated by a numerical simulation.

Item Type: Conference or Workshop Item
Erschienen: 2014
Creators: Quednau, S. and Dassinger, F. and Schlaak, Helmut F.
Title: Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors
Language: German
Abstract:

This work demonstrates a process for the in-place growth of metallic nanowires in microsystems. The wires are arranged in bunches, the so called nanowire arrays. The process expands the established ion track etch method and combines it with conventional MEMS technologies like photolithography. The process is described in detail and demonstrated by fabricating a calorimetric gas flow sensor with nanowire arrays. Two serially connected nanowire arrays are placed before and behind an electrically heated conductor on a glass substrate. The nanowire arrays work as fast temperature sensing elements to determine the gas flow over the sensor. The steady state sensor characteristics are measured, the time constant is estimated by a numerical simulation.

Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology
Event Title: ITG/GMA Symposium; Proceedings of Sensors and Measuring Systems 2014; 17
Date Deposited: 09 Mar 2015 12:53
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