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Application and comparison of alternative position sensors in high-accuracy control of an X-Y table

Fischer, Martin (1996):
Application and comparison of alternative position sensors in high-accuracy control of an X-Y table.
In: International Workshop on Advanced Motion Control AMC '96-MIE <4, 1996, Tsu-City, Japan>: Proceedings, Piscataway, NJ: IEEE, 1996,
Piscataway, NJ, IEEE, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Fischer, Martin
Title: Application and comparison of alternative position sensors in high-accuracy control of an X-Y table
Language: English
Series Name: International Workshop on Advanced Motion Control AMC '96-MIE <4, 1996, Tsu-City, Japan>: Proceedings
Place of Publication: Piscataway, NJ
Publisher: IEEE
Edition: Piscataway, NJ: IEEE, 1996
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:02
License: [undefiniert]
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