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Ferroelectric vs. structural properties of large-distance sputtered epitaxial LSMO/PZT heterostructures

Leufke, Philipp M. and Kruk, Robert and Wang, Di and Kübel, Christian and Hahn, Horst (2012):
Ferroelectric vs. structural properties of large-distance sputtered epitaxial LSMO/PZT heterostructures.
2, In: AIP Advances, (3), AIP Publishing LLC, pp. 032184, ISSN 21583226, [Online-Edition: http://dx.doi.org/10.1063/1.4756997],
[Article]

Abstract

We report on large-distance rf-magnetron sputtering as a competitive alternative to pulsed laser deposition and off-axis sputtering for the growth of epitaxial PbZr0.52Ti0.48O3(PZT)thin films. To determine the characteristics of the PZT films, the studies were focused on the interplay between microstructural and ferroelectric properties. The films were deposited on insulating or conducting (Nb-doped) SrTiO3 and MgO substrates with La0.83Sr0.17MnO3 as bottom electrode. The uniformity and homogeneity of the samples was demonstrated by using large area (1.0 mm2) top electrodes. It is shown that epitaxial heterostructures of excellent crystalline and ferroelectric quality can be deposited from a stoichiometric PZT target without the need for excess PbO in the target or post-annealing of the samples.

Item Type: Article
Erschienen: 2012
Creators: Leufke, Philipp M. and Kruk, Robert and Wang, Di and Kübel, Christian and Hahn, Horst
Title: Ferroelectric vs. structural properties of large-distance sputtered epitaxial LSMO/PZT heterostructures
Language: English
Abstract:

We report on large-distance rf-magnetron sputtering as a competitive alternative to pulsed laser deposition and off-axis sputtering for the growth of epitaxial PbZr0.52Ti0.48O3(PZT)thin films. To determine the characteristics of the PZT films, the studies were focused on the interplay between microstructural and ferroelectric properties. The films were deposited on insulating or conducting (Nb-doped) SrTiO3 and MgO substrates with La0.83Sr0.17MnO3 as bottom electrode. The uniformity and homogeneity of the samples was demonstrated by using large area (1.0 mm2) top electrodes. It is shown that epitaxial heterostructures of excellent crystalline and ferroelectric quality can be deposited from a stoichiometric PZT target without the need for excess PbO in the target or post-annealing of the samples.

Journal or Publication Title: AIP Advances
Volume: 2
Number: 3
Publisher: AIP Publishing LLC
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
Date Deposited: 17 Jun 2014 11:06
Official URL: http://dx.doi.org/10.1063/1.4756997
Identification Number: doi:10.1063/1.4756997
Funders: This work was partially supported by the Deutsche Forschungsgemeinschaft (DFG) under contract HA1344/28-1. , The authors acknowledge support from the KNMF laboratory for spectroscopy and microscopy and the State of Hessen.
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