Khan, Saif A. ; Tripathi, Ambuj ; Toulemonde, Marcel ; Trautmann, Christina ; Assmann, Walter (2013)
Sputtering yield of amorphous 13C thin films under swift heavy-ion irradiation.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 314
doi: 10.1016/j.nimb.2013.05.044
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
The sputtering yield of carbon was measured in the electronic energy loss regime by 194-MeV Au ions irradiation. Due to the overall surface contamination with hydrocarbons, the determination of sputtering yields of carbon materials is quite challenging. To separate carbon omnipresent on most surfaces from sputtered carbon, we used a carbon target consisting of 86% of 13C isotope. By measuring the thickness decrease of the thin 13C film by means of high resolution online Elastic Recoil Detection Analysis (ERDA), a sputtering yield of 49 ± 15 of 13C per Au ion was found. Simultaneously with the sputter process, the 12C content of the target increased probably due to beam-induced bond breaking of hydrocarbons attached to the surface. Our experimental results are analyzed by calculations based on the two-temperature thermal spike model.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2013 |
| Autor(en): | Khan, Saif A. ; Tripathi, Ambuj ; Toulemonde, Marcel ; Trautmann, Christina ; Assmann, Walter |
| Art des Eintrags: | Bibliographie |
| Titel: | Sputtering yield of amorphous 13C thin films under swift heavy-ion irradiation |
| Sprache: | Englisch |
| Publikationsjahr: | 1 November 2013 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Jahrgang/Volume einer Zeitschrift: | 314 |
| DOI: | 10.1016/j.nimb.2013.05.044 |
| Kurzbeschreibung (Abstract): | The sputtering yield of carbon was measured in the electronic energy loss regime by 194-MeV Au ions irradiation. Due to the overall surface contamination with hydrocarbons, the determination of sputtering yields of carbon materials is quite challenging. To separate carbon omnipresent on most surfaces from sputtered carbon, we used a carbon target consisting of 86% of 13C isotope. By measuring the thickness decrease of the thin 13C film by means of high resolution online Elastic Recoil Detection Analysis (ERDA), a sputtering yield of 49 ± 15 of 13C per Au ion was found. Simultaneously with the sputter process, the 12C content of the target increased probably due to beam-induced bond breaking of hydrocarbons attached to the surface. Our experimental results are analyzed by calculations based on the two-temperature thermal spike model. |
| Freie Schlagworte: | Swift heavy ions, Electronic sputtering, Carbon film, Thermal spike model, Elastic recoil detection analysis |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 21 Mär 2014 13:17 |
| Letzte Änderung: | 21 Mär 2014 13:17 |
| PPN: | |
| Sponsoren: | S.A.K., A.T., and W.A. thank the Dept. of Science and Technology (New Delhi) and LMU München for financial support under DST-DAAD personnel exchange program. , This work has been partially supported by the European Community as an Integrating Activity ‘Support of Public and Industrial Research using Ion beam Technology (SPIRIT)’ under EC contract No. 227012. |
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