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Sputtering yield of amorphous 13C thin films under swift heavy-ion irradiation

Khan, Saif A. and Tripathi, Ambuj and Toulemonde, Marcel and Trautmann, Christina and Assmann, Walter (2013):
Sputtering yield of amorphous 13C thin films under swift heavy-ion irradiation.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier Science Publishing, pp. 34-38, 314, ISSN 0168583X, [Online-Edition: http://dx.doi.org/10.1016/j.nimb.2013.05.044],
[Article]

Abstract

The sputtering yield of carbon was measured in the electronic energy loss regime by 194-MeV Au ions irradiation. Due to the overall surface contamination with hydrocarbons, the determination of sputtering yields of carbon materials is quite challenging. To separate carbon omnipresent on most surfaces from sputtered carbon, we used a carbon target consisting of 86% of 13C isotope. By measuring the thickness decrease of the thin 13C film by means of high resolution online Elastic Recoil Detection Analysis (ERDA), a sputtering yield of 49 ± 15 of 13C per Au ion was found. Simultaneously with the sputter process, the 12C content of the target increased probably due to beam-induced bond breaking of hydrocarbons attached to the surface. Our experimental results are analyzed by calculations based on the two-temperature thermal spike model.

Item Type: Article
Erschienen: 2013
Creators: Khan, Saif A. and Tripathi, Ambuj and Toulemonde, Marcel and Trautmann, Christina and Assmann, Walter
Title: Sputtering yield of amorphous 13C thin films under swift heavy-ion irradiation
Language: English
Abstract:

The sputtering yield of carbon was measured in the electronic energy loss regime by 194-MeV Au ions irradiation. Due to the overall surface contamination with hydrocarbons, the determination of sputtering yields of carbon materials is quite challenging. To separate carbon omnipresent on most surfaces from sputtered carbon, we used a carbon target consisting of 86% of 13C isotope. By measuring the thickness decrease of the thin 13C film by means of high resolution online Elastic Recoil Detection Analysis (ERDA), a sputtering yield of 49 ± 15 of 13C per Au ion was found. Simultaneously with the sputter process, the 12C content of the target increased probably due to beam-induced bond breaking of hydrocarbons attached to the surface. Our experimental results are analyzed by calculations based on the two-temperature thermal spike model.

Journal or Publication Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 314
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Swift heavy ions, Electronic sputtering, Carbon film, Thermal spike model, Elastic recoil detection analysis
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Ion-Beam-Modified Materials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 21 Mar 2014 13:17
Official URL: http://dx.doi.org/10.1016/j.nimb.2013.05.044
Identification Number: doi:10.1016/j.nimb.2013.05.044
Funders: S.A.K., A.T., and W.A. thank the Dept. of Science and Technology (New Delhi) and LMU München for financial support under DST-DAAD personnel exchange program. , This work has been partially supported by the European Community as an Integrating Activity ‘Support of Public and Industrial Research using Ion beam Technology (SPIRIT)’ under EC contract No. 227012.
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