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Integration und Charakterisierung von Nanostrukturen in Mikrosysteme für sensorische Anwendungen

Quednau, Sebastian ; Dassinger, Florian ; Hottes, Martin ; Stegmann, Christian ; Schlaak, Helmut F. ; Ensinger, Wolfgang (2014):
Integration und Charakterisierung von Nanostrukturen in Mikrosysteme für sensorische Anwendungen.
In: MikroSystemTechnik Kongress 2013,
Aachen, Mikrosystemtechnik Kongress , Aachen, 10/14/2013-10/16/2013, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2014
Creators: Quednau, Sebastian ; Dassinger, Florian ; Hottes, Martin ; Stegmann, Christian ; Schlaak, Helmut F. ; Ensinger, Wolfgang
Title: Integration und Charakterisierung von Nanostrukturen in Mikrosysteme für sensorische Anwendungen
Language: German
Title of Book: MikroSystemTechnik Kongress 2013
Place of Publication: Aachen
Divisions: 11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
11 Department of Materials and Earth Sciences
18 Department of Electrical Engineering and Information Technology
Event Title: Mikrosystemtechnik Kongress
Event Location: Aachen
Event Dates: 10/14/2013-10/16/2013
Date Deposited: 04 Feb 2014 10:00
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