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Numerical Simulation of a MEMS Pirani Vacuum Sensor

Quednau, Sebastian and Schlaak, Helmut F. and Völklein, Friedemann (2013):
Numerical Simulation of a MEMS Pirani Vacuum Sensor.
In: Proceedings SENSOR 2013, Nürnberg, In: AMA Conferences 2013, Nürnberg, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2013
Creators: Quednau, Sebastian and Schlaak, Helmut F. and Völklein, Friedemann
Title: Numerical Simulation of a MEMS Pirani Vacuum Sensor
Language: English
Title of Book: Proceedings SENSOR 2013
Place of Publication: Nürnberg
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology
Event Title: AMA Conferences 2013
Event Location: Nürnberg
Date Deposited: 04 Feb 2014 10:01
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