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Herstellung von robusten und kostengünstigen Nickel-Wanderkeilaktoren

Lämmle, David and Schlosser, Michael and Schlaak, Helmut F. (2013):
Herstellung von robusten und kostengünstigen Nickel-Wanderkeilaktoren.
In: Mikrosystemtechnik Kongress 2013, Aachen, 14.-16- Oktober 2013, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2013
Creators: Lämmle, David and Schlosser, Michael and Schlaak, Helmut F.
Title: Herstellung von robusten und kostengünstigen Nickel-Wanderkeilaktoren
Language: German
Uncontrolled Keywords: elektrostatischer Aktor, Galvanik, Nickel, THz,
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Event Title: Mikrosystemtechnik Kongress 2013
Event Location: Aachen
Event Dates: 14.-16- Oktober 2013
Date Deposited: 04 Feb 2014 10:00
Related URLs:
Projects: LOEWE Schwerpunktprogramm "Sensors towards Terahertz", DFG Graduiertenkolleg TICMO (GRK 1037)
Funders: LOEWE, DFG
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