Thiele, Cornelius ; Felten, Alexandre ; Echtermeyer, Tim J. ; Ferrari, Andrea C. ; Casiraghi, Cinzia ; Löhneysen, Hilbert von ; Krupke, Ralph (2013)
Electron-beam-induced direct etching of graphene.
In: Carbon, 64
doi: 10.1016/j.carbon.2013.07.038
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
We present electron-beam-induced oxidation of single- and bilayer graphene devices in a low-voltage scanning electron microscope. We show that the injection of oxygen leads to targeted etching at the focal point, enabling us to pattern graphene with a resolution of better than 20 nm. Voltage-contrast imaging, in conjunction with finite-element simulations, explain the secondary-electron intensities and correlate them to the etch profile.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2013 |
| Autor(en): | Thiele, Cornelius ; Felten, Alexandre ; Echtermeyer, Tim J. ; Ferrari, Andrea C. ; Casiraghi, Cinzia ; Löhneysen, Hilbert von ; Krupke, Ralph |
| Art des Eintrags: | Bibliographie |
| Titel: | Electron-beam-induced direct etching of graphene |
| Sprache: | Englisch |
| Publikationsjahr: | November 2013 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Carbon |
| Jahrgang/Volume einer Zeitschrift: | 64 |
| DOI: | 10.1016/j.carbon.2013.07.038 |
| Kurzbeschreibung (Abstract): | We present electron-beam-induced oxidation of single- and bilayer graphene devices in a low-voltage scanning electron microscope. We show that the injection of oxygen leads to targeted etching at the focal point, enabling us to pattern graphene with a resolution of better than 20 nm. Voltage-contrast imaging, in conjunction with finite-element simulations, explain the secondary-electron intensities and correlate them to the etch profile. |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Molekulare Nanostrukturen |
| Hinterlegungsdatum: | 18 Okt 2013 07:36 |
| Letzte Änderung: | 05 Aug 2021 15:44 |
| PPN: | |
| Sponsoren: | We acknowledge funding from the Karlsruhe Nano Micro Facility (KNMF), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology, the Alexander von Humboldt Foundation, ERC grant NANOPOTS, EPSRC grants EP/K01711X/1, EP/K017144/1, , EU Grants RODIN and GENIUS, CareRAMM, a Royal Society Wolfson Research Merit Award and the Cambridge Nokia Research Centre. |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Frage zum Eintrag |
Optionen (nur für Redakteure)
 |
Redaktionelle Details anzeigen |
Drucken
Impressum