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Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge

Hatada, Ruriko ; Baba, Koumei ; Flege, Stefan ; Nakao, S. ; Ensinger, Wolfgang (2012):
Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge.
In: Transactions of the Materials Research Society of Japan, 37 (2), pp. 227-232. The Materials Research Socitety of Japan, [Article]

Item Type: Article
Erschienen: 2012
Creators: Hatada, Ruriko ; Baba, Koumei ; Flege, Stefan ; Nakao, S. ; Ensinger, Wolfgang
Title: Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge
Language: English
Journal or Publication Title: Transactions of the Materials Research Society of Japan
Journal volume: 37
Number: 2
Publisher: The Materials Research Socitety of Japan
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 15 Dec 2012 15:35
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