Volz, K. ; Hasse, A. ; Ensinger, W. (2001)
Studies on treatment homogeneity of plasma immersion ion implantation by an optical method.
In: Surface and Coatings Technology, 136 (1-3)
doi: 10.1016/S0257-8972(00)01016-1
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
The lateral homogeneity of plasma immersion ion implantation (PIII) of three-dimensional objects has been investigated by a simple optical method. It is based on interference colours of thin oxide films of transition metals, such as titanium or tantalum. When these oxides are treated by PIII, their thickness changes as a result of sputter etching. As a result, their colour changes. It is, therefore, possible to judge the lateral treatment homogeneity at a glance with the naked eye. With the example of a model system it is demonstrated how this method works. Cylinders, either compact or with a slot, were partially covered with a strip of tantalum with tantalum oxide on top, and then treated by argon PIII. Following the changes in the colours, gradients in treatment were found on the tops and on the outer sides. In contrast, the inner walls of the cylinders with slots were hardly changed, however, the bottoms of the slots were severely affected. In some cases, the oxide was entirely lost. These findings are explained by the shape of the plasma sheath from which the ions are accelerated and by the resulting ion trajectories.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2001 |
| Autor(en): | Volz, K. ; Hasse, A. ; Ensinger, W. |
| Art des Eintrags: | Bibliographie |
| Titel: | Studies on treatment homogeneity of plasma immersion ion implantation by an optical method |
| Sprache: | Englisch |
| Publikationsjahr: | 2 Februar 2001 |
| Verlag: | Elsevier |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Surface and Coatings Technology |
| Jahrgang/Volume einer Zeitschrift: | 136 |
| (Heft-)Nummer: | 1-3 |
| DOI: | 10.1016/S0257-8972(00)01016-1 |
| Kurzbeschreibung (Abstract): | The lateral homogeneity of plasma immersion ion implantation (PIII) of three-dimensional objects has been investigated by a simple optical method. It is based on interference colours of thin oxide films of transition metals, such as titanium or tantalum. When these oxides are treated by PIII, their thickness changes as a result of sputter etching. As a result, their colour changes. It is, therefore, possible to judge the lateral treatment homogeneity at a glance with the naked eye. With the example of a model system it is demonstrated how this method works. Cylinders, either compact or with a slot, were partially covered with a strip of tantalum with tantalum oxide on top, and then treated by argon PIII. Following the changes in the colours, gradients in treatment were found on the tops and on the outer sides. In contrast, the inner walls of the cylinders with slots were hardly changed, however, the bottoms of the slots were severely affected. In some cases, the oxide was entirely lost. These findings are explained by the shape of the plasma sheath from which the ions are accelerated and by the resulting ion trajectories. |
| Freie Schlagworte: | Plasma immersion ion implantation, Homogeneity, Optical method, Colour, Thin oxide films |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 16 Nov 2012 10:36 |
| Letzte Änderung: | 30 Aug 2018 12:49 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Frage zum Eintrag |
Optionen (nur für Redakteure)
 |
Redaktionelle Details anzeigen |
Drucken
Impressum