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Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature

Hoffmann, P. S. ; Kosinova, M. ; Flege, S. ; Baake, O. ; Pollakowski, B. ; Trunova, V. ; Klein, Andreas ; Beckhoff, B. ; Kuznetsov, F. ; Ensinger, W. (2012):
Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature.
In: Analytical and Bioanalytical Chemistry, 404 (2), pp. 479-487. Springer, ISSN 1618-2642,
[Article]

Abstract

Layered samples Si(100)/C/Ni/BC x N y and Si(100)/C/Cu/BC x N y were produced by physical vapor deposition of a metal (Ni, Cu, resp.) and low-pressure chemical vapor deposition of the boron carbonitride on a Si(100) substrate. Between the Si and the Ni (Cu) and on the surface of the Ni (Cu) layer, thin carbon layers were deposited, as a diffusion barrier or as a protection against oxidation, respectively. Afterwards, the surface carbon layer was removed. As precursor, trimethylamine borane and, as an auxiliary gas, H 2 and NH 3 were used, respectively. The chemical compositions of the layers and of the interfaces in between were characterized by total-reflection X-ray fluorescence spectrometry combined with near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. The application of H 2 yielded the BC x N y compound whereas the use of NH 3 led to a mixture of h-BN and graphitic carbon. At the BC x N y /metal interface, metal borides could be identified. At the relatively high synthesis temperature of 700 °C, broad regions of Cu or Ni and Si were observed between the metal layer and the substrate Si.

Item Type: Article
Erschienen: 2012
Creators: Hoffmann, P. S. ; Kosinova, M. ; Flege, S. ; Baake, O. ; Pollakowski, B. ; Trunova, V. ; Klein, Andreas ; Beckhoff, B. ; Kuznetsov, F. ; Ensinger, W.
Title: Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature
Language: English
Abstract:

Layered samples Si(100)/C/Ni/BC x N y and Si(100)/C/Cu/BC x N y were produced by physical vapor deposition of a metal (Ni, Cu, resp.) and low-pressure chemical vapor deposition of the boron carbonitride on a Si(100) substrate. Between the Si and the Ni (Cu) and on the surface of the Ni (Cu) layer, thin carbon layers were deposited, as a diffusion barrier or as a protection against oxidation, respectively. Afterwards, the surface carbon layer was removed. As precursor, trimethylamine borane and, as an auxiliary gas, H 2 and NH 3 were used, respectively. The chemical compositions of the layers and of the interfaces in between were characterized by total-reflection X-ray fluorescence spectrometry combined with near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. The application of H 2 yielded the BC x N y compound whereas the use of NH 3 led to a mixture of h-BN and graphitic carbon. At the BC x N y /metal interface, metal borides could be identified. At the relatively high synthesis temperature of 700 °C, broad regions of Cu or Ni and Si were observed between the metal layer and the substrate Si.

Journal or Publication Title: Analytical and Bioanalytical Chemistry
Journal volume: 404
Number: 2
Publisher: Springer
Uncontrolled Keywords: Chemistry and Materials Science, Boron carbonitride/metal/silicon-layered system, Interfaces, Near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, Secondary ion mass spectroscopy
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 18 Jul 2012 09:48
Official URL: http://www.springerlink.com/content/8r40r805016g2521/abstrac...
Identification Number: doi:10.1007/s00216-012-6177-2
Funders: The authors are grateful for the financial support by Deutsche Forschungsgemeinschaft (DFG), grants EN 207/25-1 and BE 1372/6-1, and Russian Fond Fundamental Research (RFFI), grant 10-03-91332.
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