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Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature

Hoffmann, P. S. and Kosinova, M. and Flege, S. and Baake, O. and Pollakowski, B. and Trunova, V. and Klein, Andreas and Beckhoff, B. and Kuznetsov, F. and Ensinger, W. (2012):
Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature.
In: Analytical and Bioanalytical Chemistry, Springer, pp. 479-487, 404, (2), ISSN 1618-2642, [Online-Edition: http://www.springerlink.com/content/8r40r805016g2521/abstrac...],
[Article]

Abstract

Layered samples Si(100)/C/Ni/BC x N y and Si(100)/C/Cu/BC x N y were produced by physical vapor deposition of a metal (Ni, Cu, resp.) and low-pressure chemical vapor deposition of the boron carbonitride on a Si(100) substrate. Between the Si and the Ni (Cu) and on the surface of the Ni (Cu) layer, thin carbon layers were deposited, as a diffusion barrier or as a protection against oxidation, respectively. Afterwards, the surface carbon layer was removed. As precursor, trimethylamine borane and, as an auxiliary gas, H 2 and NH 3 were used, respectively. The chemical compositions of the layers and of the interfaces in between were characterized by total-reflection X-ray fluorescence spectrometry combined with near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. The application of H 2 yielded the BC x N y compound whereas the use of NH 3 led to a mixture of h-BN and graphitic carbon. At the BC x N y /metal interface, metal borides could be identified. At the relatively high synthesis temperature of 700 °C, broad regions of Cu or Ni and Si were observed between the metal layer and the substrate Si.

Item Type: Article
Erschienen: 2012
Creators: Hoffmann, P. S. and Kosinova, M. and Flege, S. and Baake, O. and Pollakowski, B. and Trunova, V. and Klein, Andreas and Beckhoff, B. and Kuznetsov, F. and Ensinger, W.
Title: Chemical interactions in the layered system BCxNy/Ni(Cu)/Si, produced by CVD at high temperature
Language: English
Abstract:

Layered samples Si(100)/C/Ni/BC x N y and Si(100)/C/Cu/BC x N y were produced by physical vapor deposition of a metal (Ni, Cu, resp.) and low-pressure chemical vapor deposition of the boron carbonitride on a Si(100) substrate. Between the Si and the Ni (Cu) and on the surface of the Ni (Cu) layer, thin carbon layers were deposited, as a diffusion barrier or as a protection against oxidation, respectively. Afterwards, the surface carbon layer was removed. As precursor, trimethylamine borane and, as an auxiliary gas, H 2 and NH 3 were used, respectively. The chemical compositions of the layers and of the interfaces in between were characterized by total-reflection X-ray fluorescence spectrometry combined with near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. The application of H 2 yielded the BC x N y compound whereas the use of NH 3 led to a mixture of h-BN and graphitic carbon. At the BC x N y /metal interface, metal borides could be identified. At the relatively high synthesis temperature of 700 °C, broad regions of Cu or Ni and Si were observed between the metal layer and the substrate Si.

Journal or Publication Title: Analytical and Bioanalytical Chemistry
Volume: 404
Number: 2
Publisher: Springer
Uncontrolled Keywords: Chemistry and Materials Science, Boron carbonitride/metal/silicon-layered system, Interfaces, Near-edge X-ray absorption fine-structure spectroscopy, X-ray photoelectron spectroscopy, Secondary ion mass spectroscopy
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 18 Jul 2012 09:48
Official URL: http://www.springerlink.com/content/8r40r805016g2521/abstrac...
Identification Number: doi:10.1007/s00216-012-6177-2
Funders: The authors are grateful for the financial support by Deutsche Forschungsgemeinschaft (DFG), grants EN 207/25-1 and BE 1372/6-1, and Russian Fond Fundamental Research (RFFI), grant 10-03-91332.
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