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Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine

Hoffmann, Peter S. and Baake, Olaf and Kosinova, Marina L. and Beckhoff, Burkhard and Klein, Andreas and Pollakowski, Beatrix and Trunova, Valentina A. and Sulyaeva, Veronika S. and Kuznetsov, Fedor A. and Ensinger, Wolfgang (2012):
Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine.
41, In: X-Ray Spectrometry, (4), pp. 240-246, ISSN 1097-4539, [Online-Edition: http://onlinelibrary.wiley.com/doi/10.1002/xrs.2387/abstract],
[Article]

Abstract

BCxNy films were produced from single-source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with a plasma enhancement at an electrical power input of 40 W. Additionally, as inert or reactive gases, H2, He, N2, and NH3, respectively, were used. The films deposited on Si(100) substrates were chemically characterized by X-ray photoelectron spectroscopy and by synchrotron radiation-based total-reflection X-ray fluorescence combined with near-edge X-ray absorption fine structure and quantified elementally by energy-dispersive X-ray spectroscopy. The results are critically compared. With the application of boranes without NH3, compounds with a dominating carbidic character were identified, whereas with the addition of NH3 to the boranes, a nitridic character was prevalent. In case of using borazine for the synthesis, the nitridic character was found at the application of all auxiliary gases. For both groups stoichiometric formulas derived from energy-dispersive X-ray spectroscopy are proposed: B3.5–4C4N2–2.5 for the carbidic region and B3.5C1.5N5 for the nitridic region.

Item Type: Article
Erschienen: 2012
Creators: Hoffmann, Peter S. and Baake, Olaf and Kosinova, Marina L. and Beckhoff, Burkhard and Klein, Andreas and Pollakowski, Beatrix and Trunova, Valentina A. and Sulyaeva, Veronika S. and Kuznetsov, Fedor A. and Ensinger, Wolfgang
Title: Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine
Language: English
Abstract:

BCxNy films were produced from single-source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with a plasma enhancement at an electrical power input of 40 W. Additionally, as inert or reactive gases, H2, He, N2, and NH3, respectively, were used. The films deposited on Si(100) substrates were chemically characterized by X-ray photoelectron spectroscopy and by synchrotron radiation-based total-reflection X-ray fluorescence combined with near-edge X-ray absorption fine structure and quantified elementally by energy-dispersive X-ray spectroscopy. The results are critically compared. With the application of boranes without NH3, compounds with a dominating carbidic character were identified, whereas with the addition of NH3 to the boranes, a nitridic character was prevalent. In case of using borazine for the synthesis, the nitridic character was found at the application of all auxiliary gases. For both groups stoichiometric formulas derived from energy-dispersive X-ray spectroscopy are proposed: B3.5–4C4N2–2.5 for the carbidic region and B3.5C1.5N5 for the nitridic region.

Journal or Publication Title: X-Ray Spectrometry
Volume: 41
Number: 4
Uncontrolled Keywords: CVD, SEM-EDX, SR-TXRF-NEXAFS, thin layers, XPS
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 09 Jul 2012 14:54
Official URL: http://onlinelibrary.wiley.com/doi/10.1002/xrs.2387/abstract
Identification Number: doi:10.1002/xrs.2387
Funders: The authors acknowledge the financial support granted by the Deutsche Forschungsgemeinschaft for the research projects ‘Nanolayer speciation’ (EN 207/22-1, BE 1372/2-1) and ‘Chemical and physical characterization of nanolayers’ (EN 207/22-2, BE 1372/2-2)., The authors of the Russian Federation thank RFBR for grant 07-03-91555-NNIO.
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