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Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine

Hoffmann, Peter S. ; Baake, Olaf ; Kosinova, Marina L. ; Beckhoff, Burkhard ; Klein, Andreas ; Pollakowski, Beatrix ; Trunova, Valentina A. ; Sulyaeva, Veronika S. ; Kuznetsov, Fedor A. ; Ensinger, Wolfgang (2012)
Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine.
In: X-Ray Spectrometry, 41 (4)
doi: 10.1002/xrs.2387
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

BCxNy films were produced from single-source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with a plasma enhancement at an electrical power input of 40 W. Additionally, as inert or reactive gases, H2, He, N2, and NH3, respectively, were used. The films deposited on Si(100) substrates were chemically characterized by X-ray photoelectron spectroscopy and by synchrotron radiation-based total-reflection X-ray fluorescence combined with near-edge X-ray absorption fine structure and quantified elementally by energy-dispersive X-ray spectroscopy. The results are critically compared. With the application of boranes without NH3, compounds with a dominating carbidic character were identified, whereas with the addition of NH3 to the boranes, a nitridic character was prevalent. In case of using borazine for the synthesis, the nitridic character was found at the application of all auxiliary gases. For both groups stoichiometric formulas derived from energy-dispersive X-ray spectroscopy are proposed: B3.5–4C4N2–2.5 for the carbidic region and B3.5C1.5N5 for the nitridic region.

Typ des Eintrags: Artikel
Erschienen: 2012
Autor(en): Hoffmann, Peter S. ; Baake, Olaf ; Kosinova, Marina L. ; Beckhoff, Burkhard ; Klein, Andreas ; Pollakowski, Beatrix ; Trunova, Valentina A. ; Sulyaeva, Veronika S. ; Kuznetsov, Fedor A. ; Ensinger, Wolfgang
Art des Eintrags: Bibliographie
Titel: Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine
Sprache: Englisch
Publikationsjahr: Juli 2012
Titel der Zeitschrift, Zeitung oder Schriftenreihe: X-Ray Spectrometry
Jahrgang/Volume einer Zeitschrift: 41
(Heft-)Nummer: 4
DOI: 10.1002/xrs.2387
Kurzbeschreibung (Abstract):

BCxNy films were produced from single-source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with a plasma enhancement at an electrical power input of 40 W. Additionally, as inert or reactive gases, H2, He, N2, and NH3, respectively, were used. The films deposited on Si(100) substrates were chemically characterized by X-ray photoelectron spectroscopy and by synchrotron radiation-based total-reflection X-ray fluorescence combined with near-edge X-ray absorption fine structure and quantified elementally by energy-dispersive X-ray spectroscopy. The results are critically compared. With the application of boranes without NH3, compounds with a dominating carbidic character were identified, whereas with the addition of NH3 to the boranes, a nitridic character was prevalent. In case of using borazine for the synthesis, the nitridic character was found at the application of all auxiliary gases. For both groups stoichiometric formulas derived from energy-dispersive X-ray spectroscopy are proposed: B3.5–4C4N2–2.5 for the carbidic region and B3.5C1.5N5 for the nitridic region.

Freie Schlagworte: CVD, SEM-EDX, SR-TXRF-NEXAFS, thin layers, XPS
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 09 Jul 2012 14:54
Letzte Änderung: 26 Mär 2015 20:13
PPN:
Sponsoren: The authors acknowledge the financial support granted by the Deutsche Forschungsgemeinschaft for the research projects ‘Nanolayer speciation’ (EN 207/22-1, BE 1372/2-1) and ‘Chemical and physical characterization of nanolayers’ (EN 207/22-2, BE 1372/2-2)., The authors of the Russian Federation thank RFBR for grant 07-03-91555-NNIO.
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