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Heteroepitaxial growth of 3C-SiC on (100) silicon by C60 and Si molecular beam epitaxy

Volz, K. and Schreiber, S. and Gerlach, J. W. and Reiber, W. and Rauschenbach, B. and Stritzker, B. and Assmann, W. and Ensinger, W. (2000):
Heteroepitaxial growth of 3C-SiC on (100) silicon by C60 and Si molecular beam epitaxy.
In: Materials Science and Engineering: A, Elsevier, pp. 255-264, 289, (1-2), ISSN 09215093, [Online-Edition: http://dx.doi.org/10.1016/S0921-5093(00)00825-X],
[Article]

Abstract

Thin, hydrogen-free 3C-SiC films were grown on (001) silicon substrates at rather low temperatures by C60-carbonization under simultaneous silicon co-deposition at different rates. Fullerene molecules and silicon were evaporated from Knudsen cells. The dependence of the structure and phase composition on Si rate and working pressure has been examined. Optimum growth conditions for the resulting SiC films are examined. Elastic recoil detection analysis spectra show the formation of a stoichiometric SiC layer under all conditions applied. X-Ray diffraction measurements reveal that the resulting 3C-SiC films, obtained under optimized conditions, are free of twin structures and epitaxially aligned to the underlying silicon substrate. Cross-section transmission electron microscopy confirms a significant structural improvement as Si is co-deposited. For samples formed without Si co-deposition, pits of pyramidal shape were found in the silicon substrate near the SiC/Si interface by scanning electron microscopy. Silicon co-evaporation during carbonization leads to a significant reduction of the pit size.

Item Type: Article
Erschienen: 2000
Creators: Volz, K. and Schreiber, S. and Gerlach, J. W. and Reiber, W. and Rauschenbach, B. and Stritzker, B. and Assmann, W. and Ensinger, W.
Title: Heteroepitaxial growth of 3C-SiC on (100) silicon by C60 and Si molecular beam epitaxy
Language: English
Abstract:

Thin, hydrogen-free 3C-SiC films were grown on (001) silicon substrates at rather low temperatures by C60-carbonization under simultaneous silicon co-deposition at different rates. Fullerene molecules and silicon were evaporated from Knudsen cells. The dependence of the structure and phase composition on Si rate and working pressure has been examined. Optimum growth conditions for the resulting SiC films are examined. Elastic recoil detection analysis spectra show the formation of a stoichiometric SiC layer under all conditions applied. X-Ray diffraction measurements reveal that the resulting 3C-SiC films, obtained under optimized conditions, are free of twin structures and epitaxially aligned to the underlying silicon substrate. Cross-section transmission electron microscopy confirms a significant structural improvement as Si is co-deposited. For samples formed without Si co-deposition, pits of pyramidal shape were found in the silicon substrate near the SiC/Si interface by scanning electron microscopy. Silicon co-evaporation during carbonization leads to a significant reduction of the pit size.

Journal or Publication Title: Materials Science and Engineering: A
Volume: 289
Number: 1-2
Publisher: Elsevier
Uncontrolled Keywords: Molecular beam epitaxy, Silicon carbide, Fullerene, Transmission electron microscopy, X-Ray diffraction pole figures
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 25 Jun 2012 11:03
Official URL: http://dx.doi.org/10.1016/S0921-5093(00)00825-X
Identification Number: doi:10.1016/S0921-5093(00)00825-X
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