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Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning

Gierl, C. and Gründl, Tobias and Debernardi, Pierluigi and Zogal, Karolina and Davani, Hooman A. and Grasse, Christian and Böhm, Gerhard and Meissner, Peter and Küppers, Franko and Amann, Markus-Christian (2012):
Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning.
In: Proceedings of SPIE, pp. 82760P-82760P, 8276, (1), [Online-Edition: http://spiedigitallibrary.org/proceedings/resource/2/psisdg/...],
[Article]

Abstract

We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

Item Type: Article
Erschienen: 2012
Creators: Gierl, C. and Gründl, Tobias and Debernardi, Pierluigi and Zogal, Karolina and Davani, Hooman A. and Grasse, Christian and Böhm, Gerhard and Meissner, Peter and Küppers, Franko and Amann, Markus-Christian
Title: Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning
Language: English
Abstract:

We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

Journal or Publication Title: Proceedings of SPIE
Volume: 8276
Number: 1
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Date Deposited: 08 Mar 2012 16:14
Official URL: http://spiedigitallibrary.org/proceedings/resource/2/psisdg/...
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