Gierl, C. ; Gründl, Tobias ; Debernardi, Pierluigi ; Zogal, Karolina ; Davani, Hooman A. ; Grasse, Christian ; Böhm, Gerhard ; Meissner, Peter ; Küppers, Franko ; Amann, Markus-Christian (2012)
Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning.
In: Proceedings of SPIE, 8276 (1)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2012 |
| Autor(en): | Gierl, C. ; Gründl, Tobias ; Debernardi, Pierluigi ; Zogal, Karolina ; Davani, Hooman A. ; Grasse, Christian ; Böhm, Gerhard ; Meissner, Peter ; Küppers, Franko ; Amann, Markus-Christian |
| Art des Eintrags: | Bibliographie |
| Titel: | Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning |
| Sprache: | Englisch |
| Publikationsjahr: | Februar 2012 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Proceedings of SPIE |
| Jahrgang/Volume einer Zeitschrift: | 8276 |
| (Heft-)Nummer: | 1 |
| URL / URN: | http://spiedigitallibrary.org/proceedings/resource/2/psisdg/... |
| Kurzbeschreibung (Abstract): | We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production. |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) > Photonik und Optische Nachrichtentechnik 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) |
| Hinterlegungsdatum: | 08 Mär 2012 16:14 |
| Letzte Änderung: | 05 Aug 2013 12:36 |
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