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Im Kleinen ganz groß : mikroelektromechanische Systeme

Schlaak, Helmut F. and Werthschützky, Roland and Eicher, D. and Röse, Andreas and Rausch, Jacqueline and Stöhr, Ingmar (2007):
Im Kleinen ganz groß : mikroelektromechanische Systeme.
In: thema Forschung. Technische Universität Darmstadt, pp. 44-50, Bd. 12, [Article]

Item Type: Article
Erschienen: 2007
Creators: Schlaak, Helmut F. and Werthschützky, Roland and Eicher, D. and Röse, Andreas and Rausch, Jacqueline and Stöhr, Ingmar
Title: Im Kleinen ganz groß : mikroelektromechanische Systeme
Language: German
Journal or Publication Title: thema Forschung. Technische Universität Darmstadt
Volume: Bd. 12
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 19 Nov 2008 16:01
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