Schlaak, Helmut F. and Werthschützky, Roland and Eicher, D. and Röse, Andreas and Rausch, Jacqueline and Stöhr, Ingmar (2007):
Im Kleinen ganz groß : mikroelektromechanische Systeme.
In: thema Forschung. Technische Universität Darmstadt, pp. 44-50, Bd. 12, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2007 |
| Creators: | Schlaak, Helmut F. and Werthschützky, Roland and Eicher, D. and Röse, Andreas and Rausch, Jacqueline and Stöhr, Ingmar |
| Title: | Im Kleinen ganz groß : mikroelektromechanische Systeme |
| Language: | German |
| Journal or Publication Title: | thema Forschung. Technische Universität Darmstadt |
| Volume: | Bd. 12 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design |
| Date Deposited: | 19 Nov 2008 16:01 |
| License: | [undefiniert] |
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