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Properties of SiCN coatings for high temperature applications - Comparison of RF-, DC- and HPPMS-sputtering

Hoche, Holger and Pusch, Casper and Riedel, Ralf and Fasel, Claudia and Klein, Andreas (2010):
Properties of SiCN coatings for high temperature applications - Comparison of RF-, DC- and HPPMS-sputtering.
In: Surface & coatings technology, pp. 21-27, 205, ISSN 0257-8972,
[Article]

Abstract

Since most conventional coatings are not stable at temperatures above 1000 °C, new coating concepts have to be introduced. Si-C-N based materials exhibit promising properties such as excellent oxidation resistance and thermal stability even at temperatures above 1300 °C. In the present study amorphous PVD-SiCN coatings were synthesized by conventional DC- and RF-magnetron sputtering as well as with a combined sputtering process using one target in the DC mode and one target in the HPPMS (High Power Pulse Magnetron Sputtering) mode. The coatings were characterized regarding their chemical, structural and mechanical properties. The coating properties strongly depend on the chemical composition and the structure of the amorphous network. Beyond that, the study includes thermal analysis of the coating materials, synthesized with the different sputtering techniques.

Item Type: Article
Erschienen: 2010
Creators: Hoche, Holger and Pusch, Casper and Riedel, Ralf and Fasel, Claudia and Klein, Andreas
Title: Properties of SiCN coatings for high temperature applications - Comparison of RF-, DC- and HPPMS-sputtering
Language: English
Abstract:

Since most conventional coatings are not stable at temperatures above 1000 °C, new coating concepts have to be introduced. Si-C-N based materials exhibit promising properties such as excellent oxidation resistance and thermal stability even at temperatures above 1300 °C. In the present study amorphous PVD-SiCN coatings were synthesized by conventional DC- and RF-magnetron sputtering as well as with a combined sputtering process using one target in the DC mode and one target in the HPPMS (High Power Pulse Magnetron Sputtering) mode. The coatings were characterized regarding their chemical, structural and mechanical properties. The coating properties strongly depend on the chemical composition and the structure of the amorphous network. Beyond that, the study includes thermal analysis of the coating materials, synthesized with the different sputtering techniques.

Journal or Publication Title: Surface & coatings technology
Volume: 205
Uncontrolled Keywords: SiCN XPS
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW)
Date Deposited: 29 Oct 2011 08:06
Identification Number: doi:10.1016/j.surfcoat.2010.03.039
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