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Electronic surface properties of rf-magnetron sputtered In2O3:Sn

Gassenbauer, Yvonne and Klein, Andreas (2004):
Electronic surface properties of rf-magnetron sputtered In2O3:Sn.
In: Solid State Ionics, pp. 141-145, 173, (1-4), ISSN 01672738,
[Online-Edition: http://dx.doi.org/10.1016/j.ssi.2004.07.065],
[Article]

Abstract

Thin films of tin doped indium oxide (In2O3:Sn or ITO) were deposited by rf-magnetron sputtering from ceramic In2O3/SnO2 targets. Surface electronic properties were investigated using in situ photoelectron spectroscopy (XPS, UPS). Bulk properties were analysed using electrical and optical measurements. While for a range of deposition parameters the ITO films clearly show degenerate bulk doping, the surfaces exhibit a Fermi level position well below the conduction band minimum.

Item Type: Article
Erschienen: 2004
Creators: Gassenbauer, Yvonne and Klein, Andreas
Title: Electronic surface properties of rf-magnetron sputtered In2O3:Sn
Language: English
Abstract:

Thin films of tin doped indium oxide (In2O3:Sn or ITO) were deposited by rf-magnetron sputtering from ceramic In2O3/SnO2 targets. Surface electronic properties were investigated using in situ photoelectron spectroscopy (XPS, UPS). Bulk properties were analysed using electrical and optical measurements. While for a range of deposition parameters the ITO films clearly show degenerate bulk doping, the surfaces exhibit a Fermi level position well below the conduction band minimum.

Journal or Publication Title: Solid State Ionics
Volume: 173
Number: 1-4
Uncontrolled Keywords: Indium tin oxide; Surface; Photoemission; Stoichiometry
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
Zentrale Einrichtungen
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres
DFG-Collaborative Research Centres (incl. Transregio)
Date Deposited: 16 Sep 2011 13:18
Official URL: http://dx.doi.org/10.1016/j.ssi.2004.07.065
Additional Information:

SFB 595 D3

Identification Number: doi:10.1016/j.ssi.2004.07.065
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