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Influence of sputter deposition parameters on the properties of tunable barium strontium titanate thin films for microwave applications

Schafranek, Robert and Giere, André and Balogh, Adam G. and Enz, Thorsten and Zheng, Yuliang and Scheele, Patrick and Jakoby, Rolf and Klein, Andreas (2009):
Influence of sputter deposition parameters on the properties of tunable barium strontium titanate thin films for microwave applications.
In: Journal of the European Ceramic Society, Elsevier Science Publishing Company, pp. 1433-1442, 29, (8), ISSN 09552219, [Online-Edition: http://dx.doi.org/10.1016/j.jeurceramsoc.2008.08.034],
[Article]

Abstract

Barium strontium titanate (BST) thin films are studied with respect to their application as tunable dielectric at microwave frequencies. BST thin films are deposited by means of radio-frequency magnetron sputtering on platinized Si substrates. The substrate to target distance during sputter deposition is varied and the effect on structure, topology, composition and electronic properties is monitored using X-ray diffraction, atomic force microscopy, Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. These findings are related to the dielectric measurements, which are carried out at 1 MHz and in the microwave range up to 8 GHz using metal-insulator-metal structures with Pt electrodes. For further device evaluation, leakage current measurements are carried out. Changing the process parameter strongly affects the composition of the films. The results emphasize the possibility for enhancing the microwave properties by fine-tuning of the chosen process parameter.

Item Type: Article
Erschienen: 2009
Creators: Schafranek, Robert and Giere, André and Balogh, Adam G. and Enz, Thorsten and Zheng, Yuliang and Scheele, Patrick and Jakoby, Rolf and Klein, Andreas
Title: Influence of sputter deposition parameters on the properties of tunable barium strontium titanate thin films for microwave applications
Language: English
Abstract:

Barium strontium titanate (BST) thin films are studied with respect to their application as tunable dielectric at microwave frequencies. BST thin films are deposited by means of radio-frequency magnetron sputtering on platinized Si substrates. The substrate to target distance during sputter deposition is varied and the effect on structure, topology, composition and electronic properties is monitored using X-ray diffraction, atomic force microscopy, Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. These findings are related to the dielectric measurements, which are carried out at 1 MHz and in the microwave range up to 8 GHz using metal-insulator-metal structures with Pt electrodes. For further device evaluation, leakage current measurements are carried out. Changing the process parameter strongly affects the composition of the films. The results emphasize the possibility for enhancing the microwave properties by fine-tuning of the chosen process parameter.

Journal or Publication Title: Journal of the European Ceramic Society
Volume: 29
Number: 8
Publisher: Elsevier Science Publishing Company
Uncontrolled Keywords: Dielectric properties; Functional applications; Microwave applications; Films; BaTiO3 and titanates
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Microwave Engineering
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
DFG-Collaborative Research Centres (incl. Transregio)
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres
Zentrale Einrichtungen
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > B - Characterisation
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > B - Characterisation > Subproject B2: Investigations of the defect structure and diffusion in ferroelectric materials
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 10 Aug 2011 10:52
Official URL: http://dx.doi.org/10.1016/j.jeurceramsoc.2008.08.034
Additional Information:

SFB 595 Cooperation B2, D3

Identification Number: doi:10.1016/j.jeurceramsoc.2008.08.034
Funders: This work was supported by the German Research Foundation (DFG) within the DFG Research Training Group 1037 “Tunable integrated components in microwave technology and optics (TICMO)” and the European network of Excellence FAME.
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