TU Darmstadt / ULB / TUbiblio

Growth kinetics and stoichiometry of ZnS films obtained by close-spaced vacuum sublimation technique

Kurbatov, D. and Opanasyuk, A. and Duvanov, S. M. and Balogh, A. G. and Khlyap, H. (2011):
Growth kinetics and stoichiometry of ZnS films obtained by close-spaced vacuum sublimation technique.
In: Solid State Sciences, Elsevier Science Publishing Company, pp. 1068-1071, 13, (5), [Online-Edition: http://www.sciencedirect.com/science/article/pii/S1293255811...],
[Article]

Abstract

Surface roughness, stoichiometry, deposition rates and activation energy of different growth mechanisms of zinc sulfide films are investigated. The films were deposited onto glass-ceramic substrates by close-spaced vacuum sublimation technique (CSVS) at different deposition temperatures. Rutherford backscattering spectroscopy (RBS) using helium ions with 1.8 MeV energy and EDAX method were applied for determination of film thickness and stoichiometry. The effect of the deposition temperature on film properties has been studied.

Item Type: Article
Erschienen: 2011
Creators: Kurbatov, D. and Opanasyuk, A. and Duvanov, S. M. and Balogh, A. G. and Khlyap, H.
Title: Growth kinetics and stoichiometry of ZnS films obtained by close-spaced vacuum sublimation technique
Language: English
Abstract:

Surface roughness, stoichiometry, deposition rates and activation energy of different growth mechanisms of zinc sulfide films are investigated. The films were deposited onto glass-ceramic substrates by close-spaced vacuum sublimation technique (CSVS) at different deposition temperatures. Rutherford backscattering spectroscopy (RBS) using helium ions with 1.8 MeV energy and EDAX method were applied for determination of film thickness and stoichiometry. The effect of the deposition temperature on film properties has been studied.

Journal or Publication Title: Solid State Sciences
Volume: 13
Number: 5
Publisher: Elsevier Science Publishing Company
Uncontrolled Keywords: Deposition rate, Rutherford backscattering spectrometry, Stoichiometry, ZnS films
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 25 Jul 2011 13:37
Official URL: http://www.sciencedirect.com/science/article/pii/S1293255811...
Funders: This work was supported by the Project No 0110U001151 of the Ministry of Science and Education of the Ukraine and Bilateral Co-operation Project UKR05/003 of the Ministry of Science and Education of the Ukraine, and International Büro of BMBF at DLR, Germany.
Export:

Optionen (nur für Redakteure)

View Item View Item