TU Darmstadt / ULB / TUbiblio

Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics

Schneider, Jörg J. and Hoffmann, Rudolf C. and Issanin, Alexander and Dilfer, Stefan (2011):
Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics.
In: Materials Science and Engineering B , pp. 965-971, 176, (13), [Article]

Item Type: Article
Erschienen: 2011
Creators: Schneider, Jörg J. and Hoffmann, Rudolf C. and Issanin, Alexander and Dilfer, Stefan
Title: Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics
Language: English
Journal or Publication Title: Materials Science and Engineering B
Volume: 176
Number: 13
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD)
Date Deposited: 15 Jul 2011 07:04
Identification Number: doi:10.1016/j.mseb.2011.05.024
Export:

Optionen (nur für Redakteure)

View Item View Item