Schneider, Jörg J. and Hoffmann, Rudolf C. and Issanin, Alexander and Dilfer, Stefan (2011):
Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics.
176, In: Materials Science and Engineering B , (13), pp. 965-971, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2011 |
| Creators: | Schneider, Jörg J. and Hoffmann, Rudolf C. and Issanin, Alexander and Dilfer, Stefan |
| Title: | Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics |
| Language: | English |
| Journal or Publication Title: | Materials Science and Engineering B |
| Volume: | 176 |
| Number: | 13 |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Surface Science 16 Department of Mechanical Engineering 16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD) |
| Date Deposited: | 15 Jul 2011 07:04 |
| Identification Number: | doi:10.1016/j.mseb.2011.05.024 |
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