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Free-Standing Patterned Ceramic Structures Obtained by Soft Micromolding

Seils, Sascha and Baraki, Raschid and Jamin, Christine and Guillon, Olivier (2011):
Free-Standing Patterned Ceramic Structures Obtained by Soft Micromolding.
In: Advanced Engineering Materials, pp. 502-508, 13, (6), ISSN 14381656, [Online-Edition: http://dx.doi.org/10.1002/adem.201100013],
[Article]

Abstract

Patterned ceramic films with constant thickness can be processed by a soft lithographic method. By using micromolding in capillaries, the slurry is forced to flow through channels created in an elastomer stamp. After drying, layers deposited on an amorphous carbon substrate were sintered under inert atmosphere. Free-standing ceramic structures with high aspect ratio were obtained with lateral resolution better than 1mm. Dimensional changes were monitored in comparison to films deposited on stiff sapphire substrate. This technique enables to process a large variety of structures, from optical or electronic components to sieve and MEMS applications.

Item Type: Article
Erschienen: 2011
Creators: Seils, Sascha and Baraki, Raschid and Jamin, Christine and Guillon, Olivier
Title: Free-Standing Patterned Ceramic Structures Obtained by Soft Micromolding
Language: English
Abstract:

Patterned ceramic films with constant thickness can be processed by a soft lithographic method. By using micromolding in capillaries, the slurry is forced to flow through channels created in an elastomer stamp. After drying, layers deposited on an amorphous carbon substrate were sintered under inert atmosphere. Free-standing ceramic structures with high aspect ratio were obtained with lateral resolution better than 1mm. Dimensional changes were monitored in comparison to films deposited on stiff sapphire substrate. This technique enables to process a large variety of structures, from optical or electronic components to sieve and MEMS applications.

Journal or Publication Title: Advanced Engineering Materials
Volume: 13
Number: 6
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Nonmetallic-Inorganic Materials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 11 Jul 2011 08:07
Official URL: http://dx.doi.org/10.1002/adem.201100013
Identification Number: doi:10.1002/adem.201100013
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