Marathe, Vaibhav G. and Stefanov, Yordan and Schwalke, Udo and DasGupta, Nandita (2006):
Study of Pinholes in Ultrathin SiO2 by C-AFM Technique.
In: Thin Solid Films, 504 (1-2), pp. 11-14. [Article]
Official URL: http://dx.doi.org/10.1016/j.tsf.2005.09.019
| Item Type: | Article |
|---|---|
| Erschienen: | 2006 |
| Creators: | Marathe, Vaibhav G. and Stefanov, Yordan and Schwalke, Udo and DasGupta, Nandita |
| Title: | Study of Pinholes in Ultrathin SiO2 by C-AFM Technique |
| Language: | English |
| Journal or Publication Title: | Thin Solid Films |
| Journal volume: | 504 |
| Number: | 1-2 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 05 Jul 2011 06:46 |
| Official URL: | http://dx.doi.org/10.1016/j.tsf.2005.09.019 |
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