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Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges?

Schwalke, Udo (2008):
Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges?
In: DPG Spring Meeting, Berlin, Deutschland, 25.-29.02.2008, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2008
Creators: Schwalke, Udo
Title: Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges?
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: DPG Spring Meeting
Event Location: Berlin, Deutschland
Event Dates: 25.-29.02.2008
Date Deposited: 01 Jul 2011 08:42
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