Schwalke, Udo (2008):
Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges?
In: DPG Spring Meeting, Berlin, Deutschland, 25.-29.02.2008, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2008 |
| Creators: | Schwalke, Udo |
| Title: | Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges? |
| Language: | English |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Event Title: | DPG Spring Meeting |
| Event Location: | Berlin, Deutschland |
| Event Dates: | 25.-29.02.2008 |
| Date Deposited: | 01 Jul 2011 08:42 |
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